High speed type
Non-destructive measurement method
Measuring speed: less than 0.05 s / point
Resolution: Can be measured in a tiny square area of 1.0 * 1.0 mm
High accuracy: can detect ultra-thin film thickness below 1nm
High reproducibility: Film thickness: 0.1 nm, refractive index: 0.001
Simple operation: no driving part, can reduce the trouble of calibration
Modular application: The head module is detachable and can be used in other systems
Measurement method: PCA
Reproducibility: Film thickness 0.1nm
Light source: Semiconductor laser 636nm Measurement point (square)
Line measurement: 0.5mm
Surface measurement: 0.1mm
Angle of incidence: Standard 70 degrees
Table size: 4 "
Measurement speed (surface measurement ): Up to 10000 dots / min Size: 258 * 300 * 235mm
Weight: 9Kg Accessories: PC
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