Optical Profiler Multipurpose surface measurement


Widely applicable industries such as semiconductor, microelectronics, aerospace industry, biopharmaceuticals, biotechnology and various surface processing, etc

1. Confocal microscope
2. White light interference
3. Multi-focal surface superposition
4. Z axis accuracy is up to nm
5. Easy operation
6. 3D imaging is possible
7. Optical detection is non-destructive
8. Calculate surface roughness
9. High color reproduction
10. Complete measurement and analysis kit

CCD pixels: 1360 * 1024 pixels
LED light source: white (550nm) (about 40,000 hours life) (optional other colors)
Z axis travel: 40mm (1.6 “)
Z axis accuracy: <0.5μm / mm
Z axis resolution: 2nm
Maximum vertical scanning range: conjugate focal length 36mm, white light interference 7mm, multifocal surface superimposed 25mm
Step height repeatability: <3nm
Sample reflectivity: 0.05% ~ 100%
Display resolution: 0.01nm
Magnification: Conjugate focal 2.5X ~ 150X  White light interference 5X ~ 100X
Manual Table stroke: 200*200mm / 300*300mm / 500*500mm
Pneumatic Optical Table