SSS-X
Widely applicable industries such as semiconductor, microelectronics, aerospace industry, biopharmaceuticals, biotechnology and various surface processing, etc
1. White light interference
2. Multi-focal surface superposition
3. Z axis accuracy is up to nm
4. Easy operation
5. 3D imaging is possible
6. Optical detection is non-destructive
7. Calculate surface roughness
8. High color reproduction
9. Complete measurement and analysis kit
CCD pixels: 680 * 480 pixels
LED light source: white (550nm) (about 40,000 hours life)
Z axis travel: 40mm (1.6 “)
Z axis accuracy: <0.5μm / mm Z axis resolution: 2nm maximum
Vertical scanning range: 7mm
Step height repeatability: <3nm Sample reflectivity: 0.05% ~ 100%
Display resolution: 0.01nm
Magnification: White light interference 5X ~ 100X
Manual Table stroke: 200*200mm / 300*300mm / 500*500mm
Pneumatic Optical Table